4-probe station Cascade Microtech MPS 150 (MPS150)

Detailed description:

Elektrické testování čipů bez nutnosti upevnění k substrátu s možností použití substrátu o velikosti až 100x100 mm

Publications:

• Horký, M., 2025: Controlling the magnetic phase transition in spatially confined structures. PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6(12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450; FULL TEXT
  (ALD-FIJI, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, LITESCOPE-LYRA, WITEC-RAMAN, WIRE-BONDER, NANOSCAN)
• GHOSH, K.; NG, S.; LAZAR, P.; KANDAMBATH PADINJAREVEETIL, A.; MICHALIČKA, J.; PUMERA, M., 2024: 2D Germanane-MXene Heterostructures for Cations Intercalation in Energy Storage Applications. ADVANCED FUNCTIONAL MATERIALS , doi: 10.1002/adfm.202308793; FULL TEXT
  (RIGAKU3, KRATOS-XPS, WITEC-RAMAN, TITAN, VERIOS, KEITHLEY-4200, MPS150, BET-DEGASSER, BET-ANAMET)
• KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: Se-doped Nb2O5-Al2O3 composite-ceramic nanoarrays via the anodizing of Al/Nb bilayer in selenic acid. CERAMICS INTERNATIONAL 49(22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134; FULL TEXT
  (MAGNETRON, VERIOS, KRATOS-XPS, WITEC-RAMAN, MPS150, KEITHLEY-4200)
• GHOSH, K.; IFFELSBERGER, C.; KONEČNÝ, M.; VYSKOČIL, J.; MICHALIČKA, J.; PUMERA, M., 2023: Nanoarchitectonics of Triboelectric Nanogenerator for Conversion of Abundant Mechanical Energy to Green Hydrogen. ADVANCED ENERGY MATERIALS 13(11), doi: 10.1002/aenm.202203476; FULL TEXT
  (VERIOS, MIRA-STAN, TITAN, RIGAKU3, MPS150, KEITHLEY-4200, ICON-SPM)

• KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
  (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)
• Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: Nanotubes from the Misfit Layered Compound (SmS)(1.)19TaS2: Atomic Structure, Charge Transfer, and Electrical Properties. CHEMISTRY OF MATERIALS 34(4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106; FULL TEXT
  (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD-FIJI)
• Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS , p. 1 - 145; FULL TEXT
  (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)
• Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR´S THESIS , p. 1 - 44; FULL TEXT
  (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
• Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR´S THESIS , p. 1 - 60; FULL TEXT
  (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
• KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664; FULL TEXT
  (ALD-FIJI, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
• GHOSH, K.; NG, S.; IFFELSBERGER, C.; PUMERA, M., 2022: 2D MoS2/carbon/polylactic acid filament for 3D printing: Photo and electrochemical energy conversion and storage. APPLIED MATERIALS TODAY 26, p. 101301-1 - 10, doi: 10.1016/j.apmt.2021.101301; FULL TEXT
  (VERIOS, KRATOS-XPS, RIGAKU3, MPS150, KEITHLEY-4200)
• NG, S.; GHOSH, K.; VYSKOČIL, J.; PUMERA, M., 2022: Two-dimensional vanadium sulfide flexible graphite/polymer films for near-infrared photoelectrocatalysis and electrochemical energy storage. CHEMICAL ENGINEERING JOURNAL 435(P3), p. 135131-1 - 14, doi: 10.1016/j.cej.2022.135131; FULL TEXT
  (MPS150, KEITHLEY-4200, VERIOS, KRATOS-XPS, WITEC-RAMAN, RIGAKU3)
• GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J., 2022: Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers. JOURNAL OF MATERIALS SCIENCE 57(3), p. 1923 - 13, doi: 10.1007/s10853-021-06846-6; FULL TEXT
  (RIE-FLUORINE, DRIE, EVAPORATOR, WIRE-BONDER, WITEC-RAMAN, MPS150, KEITHLEY-4200, SUSS-MA8, DWL)
• KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 122 - 5, doi: 10.37904/nanocon.2020.3692; FULL TEXT
  (MAGNETRON, VERIOS, MPS150)
• Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS ; FULL TEXT
  (NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD-FIJI, EVAPORATOR, MIRA-EBL, MPS150)
• Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER´S THESIS , p. 1 - 84; FULL TEXT
  (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, RIE-FLUORINE, DRIE, LYRA, ICON-SPM)
• Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER´S THESIS , p. 1 - 67
  (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, WIRE-BONDER, ICON-SPM)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
  (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
  (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• HRDÝ, R.; KYNCLOVÁ, H.; KLEPÁČOVÁ, I.; BARTOŠÍK, M.; NEUŽIL, P., 2017: Portable Lock-in Amplifier-Based Electrochemical Method to Measure an Array of 64 Sensors for Point-of-Care Applications. ANALYTICAL CHEMISTRY 89(17), p. 8731 - 7, doi: 10.1021/acs.analchem.7b00776; FULL TEXT
  (MPS150, WIRE-BONDER)
• CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: Microelectrode array system as platforms for single nanowire based sensors. JOURNAL OF ELECTRICAL ENGINEERING 68(2), p. 158 - 5, doi: 10.1515/jee-2017-0023; FULL TEXT
  (DWL, KAUFMAN, MPS150, RIGAKU3)

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