Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Ing. Jan Prášek, Ph.D.
Technologie / Metodologie: Etching & Deposition
Instrument status: Non Operational Non Operational, 12.3.2025 17:48, Cleaning after significant process failure
Equipment placement: CEITEC Nano - C1.36
Výzkumná skupina: CF: CEITEC Nano


Popis:

The UHV physical vapor deposition system for thin-film e-beam deposition (mostly metals). A carousel for eight different materials, substrate rotation, and tilting is available.


Publications:

  • JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: Coupling of photovoltaics with neurostimulation electrodes-optical to electrolytic transduction. JOURNAL OF NEURAL ENGINEERING 21(4), doi: 10.1088/1741-2552/ad593d; FULL TEXT
    (PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)
  • GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering. ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
    (EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)
  • KRPENSKÝ, J.; HORÁK, M.; KABÁT, J.; PLANER, J.; KEPIČ, P.; KŘÁPEK, V.; KONEČNÁ, A., 2024: Analytical electron microscopy analysis of insulating and metallic phases in nanostructured vanadium dioxide. NANOSCALE ADVANCES 6(13), p. 3338 - 9, doi: 10.1039/d4na00338a; FULL TEXT
    (TITAN, LYRA, EVAPORATOR)
  • WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: Unidirectional propagation of zero-momentum magnons. APPLIED PHYSICS LETTERS 125(13), doi: 10.1063/5.0218478; FULL TEXT
    (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)
  • FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; TRUNEC, M.; SOBOLA, D.; MOUSA, M., 2024: Nanometer - Thick titanium film as a silicon migration barrier. MATERIALS TODAY COMMUNICATIONS 40, p. 1 - 17, doi: 10.1016/j.mtcomm.2024.109326; FULL TEXT
    (KRATOS-XPS, WITEC-RAMAN, ICON-SPM, EVAPORATOR)

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