Electron beam evaporator BESTEC (EVAPORATOR)

CONTACT US

Guarantor: Ing. Jan Prášek, Ph.D.
Technologie / Metodologie: Etching & Deposition
Instrument status: Non Operational Non Operational, 12.3.2025 17:48, Cleaning after significant process failure
Equipment placement: CEITEC Nano - C1.36
Výzkumná skupina: CF: CEITEC Nano


Popis:

The UHV physical vapor deposition system for thin-film e-beam deposition (mostly metals). A carousel for eight different materials, substrate rotation, and tilting is available.


Publications:

  • ROY, R.; HOLEC, D.; MICHAL, L.; HEMZAL, D.; SARKAR, S.; KUMAR, G.; NEČAS, D.; DHANKHAR, M.; KAUSHIK, P.; GOMEZ PEREZ, I.; ZAJÍČKOVÁ, L., 2024: Possible charge ordering and anomalous transport in graphene/graphene quantum dot heterostructure. JOURNAL OF PHYSICS CONDENSED MATTER 36(26), p. 265601 - 12, doi: 10.1088/1361-648X/ad31bf; FULL TEXT
    (RAITH, EVAPORATOR, ICON-SPM, VERSALAB)
  • AIGNER, A.; LIGMAJER, F.; ROVENSKÁ, K.; HOLOBRÁDEK, J.; IDESOVÁ, B.; MAIER, S.; TITTL, A.; MENEZES, L., 2024: Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces. NANO LETTERS 24(35), p. 10742 - 8, doi: 10.1021/acs.nanolett.4c01703; FULL TEXT
    (KAUFMAN, ALD, EVAPORATOR)
  • KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6(12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450; FULL TEXT
    (ALD, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, LITESCOPE-LYRA, WITEC-RAMAN, WIRE-BONDER)
  • KLÍMA, J.; WOJEWODA, O.; ROUČKA, V.; MOLNÁR, T.; HOLOBRÁDEK, J.; URBÁNEK, M., 2024: Zero-field spin wave turns. APPLIED PHYSICS LETTERS 124(11), doi: 10.1063/5.0189394; FULL TEXT
    (BRILLOUIN, EVAPORATOR, LYRA, KERR-MICROSCOPE, RAITH, ICON-SPM)
  • Kunc, J.; Fridrišek, T.; Shestopalov, M.; Jo, J.; Park, K., 2024: Graphene–insulator–metal diodes: Enhanced dielectric strength of the Al2O3 barrier. AIP ADVANCES 14(9), p. 1 - 9, doi: 10.1063/5.0223763; FULL TEXT
    (RAITH, RIE-FLUORINE, ALD, EVAPORATOR, WIRE-BONDER, KRATOS-XPS)

Show more publications...