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Joint Research on Scatterometry and AFM Wafer Metrology
FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011
Bodermann, B; Buhr, E; Danzebrink, HU; Bar, M; Scholze, F; Krumrey, M; Wurm, M; Klapetek, P; Hansen, PE; Korpelainen, V; van Veghel, M; Yacoot, A; Siitonen, S; El Gawhary, O; Burger, S; Saastamoinen, T, 2011: Joint Research on Scatterometry and AFM Wafer Metrology. FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 1395, doi: 10.1063/1.3657910
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